Davydenko, who is seeded seventh, was runner-up in Munich on 2004. Cilic had won three of his four previous matches against the Russian, but has now lost the last two.

Davydenko will next play Radomir Stepanek of the Czech Republic, who beat 2007 Munich champion Philipp Kohlschreiber of Germany, 6-4, 6-0.

Philipp Petzschner of Germany edged Potito Starace of Italy 7-6 (3), 7-6 (6) to set up a semifinal against another German, fifth-seeded Florian Mayer, who overcame Bulgarian teenager Gregori Dimitrov 7-6 (4), 3-6, 6-4.

The 69th-ranked Dimitrov turns 20 next month and is the only teenager in the top 100. It was his first quarterfinal appearance on the tour.

Despite hitting eight aces the Bulgarian could not match the steady play of Mayer, who had never won a match in Munich in three previous visits and who has reached his third semifinal of the year.

In Barcelona, Italy's Roberta Vinci will play Lucie Hradecka of the Czech Republic in her third consecutive Barcelona Open final after outlasting Laura Pous-Tio 4-6, 6-4, 7-6 (4) on Friday.

The sixth-seeded Vinci, who won the clay-court event in 2009 and finished runner-up last year, overcame a shaky serve to save seven break points and break her Spanish opponent back another six times.

Hradecka upset fifth-seeded Sara Errani of Italy 6-1, 7-5 in their semifinal as the 25-year-old Prague native struck 10 aces to oust the highest-seeded player left in the tournament.

Pous-Tio had already played more than two sets earlier in the day to beat Polona Hercog 6-7 (7), 6-1, 7-5 after their quarterfinal match was suspended Thursday in the first set because of rain.